JOURNAL ARTICLES
Kusano Y, I Ishii, A Teshigahara, T Kamiya, GL Luo, DA Horsley, “High-SPL air-coupled piezoelectric micromachined ultrasonic transducers
based on 36% ScAlN thin-film,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 66, no. 9, pp. 1488-1496, 2019.
DOI: 10.1109/TUFFC.2019.2921983
Kusano Y, Q Wang, GL Luo, RQ Rudy, RG Polcawich, DA Horsley, “Effects of DC bias tuning on air-coupled PZT piezoelectric micromachined ultrasonic transducers,” Journal of Microelectromechanical Systems, vol. 27, no. 2, pp. 296-304, 2018. (selected as 1 of 3 excellent quality papers of the issue).
DOI: 10.1109/JMEMS.2018.2797684
Kusano Y, H Saito, LS Vlasenko, MP Vlasenko, E Ohta, KM Itoh, “Low symmetry configurations of vacancy-oxygen complexes in irradiated silicon,” Journal of Applied Physics, 118(24), 245703, 2016.
DOI: 10.1063/1.4938199
Saito H, S Hayashi, Y Kusano, KM Itoh, LS Vlasenko, MP Vlasenko, “Electron spin resonance study of surface and oxide interface spin-triplet centers on (100) silicon wafers,” Journal of Applied Physics, 123(16), 161582, 2018.
DOI: 10.1063/1.5010816
CONFERENCE PROCEEDINGS
Kusano Y, GL Luo, DA Horsley, “Spurious mode free hexagonal PMUT array,” 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, 2019, pp. 238-241. (oral)
DOI: 10.1109/TRANSDUCERS.2019.8808614
Kusano Y, GL Luo, I Ishii, A Teshigahara, DA Horsley, “36% Scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers,” 2018 IEEE International Ultrasonic Symposium (IUS), Kobe, 2018. (oral)
DOI: 10.1109/ULTSYM.2018.8579694
Kusano Y, J Segovia-Fernandez, S Sonmezoglu, R Amirtharajah, DA Horsley, “Frequency selective MEMS microphone based on a bioinspired spiral-shaped acoustic resonator,” 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, 2017, pp. 71-74. (oral)
DOI: 10.1109/TRANSDUCERS.2017.7993990
Kusano Y, Q Wang, RQ Rudy, RG Polcawich, DA Horsley, “Wideband air-coupled PZT piezoelectric micromachined ultrasonic transducer through DC bias tuning,” 2017 IEEE 30th International Conference on Micro Electro MechanicalSystems (MEMS), Las Vegas, NV, 2017, pp. 1204-1207. (poster)
DOI: 10.1109/MEMSYS.2017.7863632
Luo GL, Y Kusano, DA Horsley, “Immersion PMUTs fabricated with a low-thermal budget surface micromachining process,” 2018 IEEE International Ultrasonic Symposium (IUS), Kobe, 2018. (oral)
DOI: 10.1109/ULTSYM.2018.8579826
Luo GL, Q Wang, Y Kusano, DA Horsley, “Increased Output-Pressure PMUTs with a Sloped Profile Fabricated via Surface Micromachining,” 2018 IEEE International Frequency Control Symposium (IFCS), CA, 2018. (poster)
Wang Q, GL Luo, Y Kusano, DA Horsley, “Low thermal budget surface micromachining process for piezoelectric micromachined ultrasonic transducers arrays with in-situ vacuum sealed cavities,” Hilton Head Solid-State Sensors, Actuators and Microsystems Workshop, SC, 2018. (poster)
Luo GL, S Fung, Q Wang, Y Kusano, J Lasiter, D Kidwell, DA Horsley, “High fill factor piezoelectric micromachined ultrasonic transducers on transparent substrates,” 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, 2017, pp. 1053-1056. (poster)
DOI: 10.1109/TRANSDUCERS.2017.7994233
Sonmezoglu S, J Segovia-Fernandez, ST Block, Y Kusano, JM Tsai, R Amirtharajah, DA Horsley, “Passive signal amplification via series-piezoelectric read-out,” 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, 2017, pp. 155-158. (oral)
DOI: 10.1109/TRANSDUCERS.2017.7994011
Segovia-Fernandez J, S Sonmezoglu, ST Block, Y Kusano, JM Tsai, R Amirtharajah, DA Horsley, "Monolithic piezoelectric
Aluminum Nitride MEMS-CMOS microphone," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, 2017, pp. 414-417. (oral)
DOI: 10.1109/TRANSDUCERS.2017.7994075
Wang Q, Y Kusano, DA Horsley, “Coupled piezoelectric micromachined ultrasonic transducers with improved pulse-echo performance,” 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, 2017, pp. 151-154. (oral)
REVIEW EXPERIENCES
IEEE Journal of Microelectromechanical Systems (3)
IEEE Sensors Letters (2)
IEEE Access (2)
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (3)